연구

국외학술지[2016년 1월] Junkyu Park, Jongbin Kang, Sungwook Park, "Comparisons of Spray Characteristics Depending on the Nozzle Parameters in a Wafer Cleaning System Using a Twin-Fluid Nozzle"

2020-01-19

Title : Comparisons of Spray Characteristics Depending on the Nozzle Parameters in a Wafer Cleaning System Using a Twin-Fluid Nozzle


Authors : Junkyu Park, Jongbin Kang, Sungwook Park


Journal : Journal of Electrochemical Society


Information : 163 (3) E88-96 (2016)


DOI : 10.1149/2.0811603jes