연구
국외학술지[2016년 1월] Junkyu Park, Jongbin Kang, Sungwook Park, "Comparisons of Spray Characteristics Depending on the Nozzle Parameters in a Wafer Cleaning System Using a Twin-Fluid Nozzle"
04763 서울특별시 성동구 왕십리로 222, 공업센터별관 205-2호
Tel. 02-2220-0430 Fax. 02-2220-4588 E-mail. parks@hanyang.ac.kr
Title : Comparisons of Spray Characteristics Depending on the Nozzle Parameters in a Wafer Cleaning System Using a Twin-Fluid Nozzle
Authors : Junkyu Park, Jongbin Kang, Sungwook Park
Journal : Journal of Electrochemical Society
Information : 163 (3) E88-96 (2016)
DOI : 10.1149/2.0811603jes